Learning to Optimize Capacity Planning in Semiconductor Manufacturing

In manufacturing, capacity planning is the process of allocating production resources in accordance with variable demand. The current industry practice in semiconductor manufacturing typically applies heuristic rules to prioritize actions, such as future change lists that account for incoming machine and recipe dedications. However, while offering interpretability, heuristics cannot easily account for the complex interactions along the process flow that can gradually lead to the formation of bottlenecks. Here, we present a neural network-based model for capacity planning on the level of individual machines, trained using deep reinforcement learning. By representing the policy using a heterogeneous graph neural network, the model directly captures the diverse relationships among machines and processing steps, allowing for proactive decision-making. We describe several measures taken to achieve sufficient scalability to tackle the vast space of possible machine-level actions. Our evaluation results cover Intel's small-scale Minifab model and preliminary experiments using the popular SMT2020 testbed. In the largest tested scenario, our trained policy increases throughput and decreases cycle time by about 1.8% each.

GenAI for Simulation Model in Model-Based Systems Engineering

Generative AI (GenAI) has demonstrated remarkable capabilities in code generation, and its integration into complex product modeling and simulation code generation can significantly enhance the efficiency of the system design phase in Model-Based Systems Engineering (MBSE). In this study, we introduce a generative system design methodology framework for MBSE, offering a practical approach for the intelligent generation of simulation models for system physical properties. First, we employ inference techniques, generative models, and integrated modeling and simulation languages to construct simulation models for system physical properties based on product design documents. Subsequently, we fine-tune the language model used for simulation model generation on an existing library of simulation models and additional datasets generated through generative modeling. Finally, we introduce evaluation metrics for the generated simulation models for system physical properties. Our proposed approach to simulation model generation presents the innovative concept of scalable templates for simulation models. Using these templates, GenAI generates simulation models for system physical properties through code completion. The experimental results demonstrate that, for mainstream open-source Transformer-based models, the quality of the simulation model is significantly improved using the simulation model generation method proposed in this paper.

Crowd-level Abnormal Behavior Detection via Multi-scale Motion Consistency Learning

Detecting abnormal crowd motion emerging from complex interactions of individuals is paramount to ensure the safety of crowds. Crowd-level abnormal behaviors (CABs), e.g., counter flow and crowd turbulence, are proven to be the crucial causes of many crowd disasters. In the recent decade, video anomaly detection (VAD) techniques have achieved remarkable success in detecting individual-level abnormal behaviors (e.g., sudden running, fighting and stealing), but research on VAD for CABs is rather limited. Unlike individual-level anomaly, CABs usually do not exhibit salient difference from the normal behaviors when observed locally, and the scale of CABs could vary from one scenario to another. In this paper, we present a systematic study to tackle the important problem of VAD for CABs with a novel crowd motion learning framework, multi-scale motion consistency network (MSMC-Net). MSMC-Net first captures the spatial and temporal crowd motion consistency information in a graph representation. Then, it simultaneously trains multiple feature graphs constructed at different scales to capture rich crowd patterns. An attention network is used to adaptively fuse the multi-scale features for better CAB detection. For the empirical study, we consider three large-scale crowd event datasets, UMN, Hajj and Love Parade. Experimental results show that MSMC-Net could substantially improve the state-of-the-art performance on all the datasets.