Large language models (LLM) have achieved remarkable performance on various NLP tasks and are augmented by tools for broader applications. Yet, how to evaluate and analyze the tool-utilization capability of LLMs is still under-explored. In contrast to previous works that evaluate models holistically, we comprehensively decompose the tool utilization into multiple sub-processes, including instruction following, planning, reasoning, retrieval, understanding, and review. Based on that, we further introduce \shortname~to evaluate the tool utilization capability step by step. \shortname~disentangles the tool utilization evaluation into several sub-domains along model capabilities, facilitating the inner understanding of both holistic and isolated competency of LLMs. We conduct extensive experiments on \shortname~and in-depth analysis of various LLMs. \shortname~ not only exhibits consistency with the outcome-oriented evaluation but also provides a more fine-grained analysis of the capabilities of LLMs, providing a new perspective in LLM evaluation on tool-utilization ability. The benchmark will be available at \href{https://github.com/open-compass/T-Eval}{https://github.com/open-compass/T-Eval}.