As a fundamental task of vision-based perception, 3D occupancy prediction reconstructs 3D structures of surrounding environments. It provides detailed information for autonomous driving planning and navigation. However, most existing methods heavily rely on the LiDAR point clouds to generate occupancy ground truth, which is not available in the vision-based system. In this paper, we propose an OccNeRF method for self-supervised multi-camera occupancy prediction. Different from bounded 3D occupancy labels, we need to consider unbounded scenes with raw image supervision. To solve the issue, we parameterize the reconstructed occupancy fields and reorganize the sampling strategy. The neural rendering is adopted to convert occupancy fields to multi-camera depth maps, supervised by multi-frame photometric consistency. Moreover, for semantic occupancy prediction, we design several strategies to polish the prompts and filter the outputs of a pretrained open-vocabulary 2D segmentation model. Extensive experiments for both self-supervised depth estimation and semantic occupancy prediction tasks on nuScenes dataset demonstrate the effectiveness of our method.