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Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks

Mar 12, 2022
Haoyu Yang, Zongyi Li, Kumara Sastry, Saumyadip Mukhopadhyay, Mark Kilgard, Anima Anandkumar, Brucek Khailany, Vivek Singh, Haoxing Ren

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