Get our free extension to see links to code for papers anywhere online!

Chrome logo Add to Chrome

Firefox logo Add to Firefox

Picture for Xuezhong Lin

Lithography Hotspot Detection via Heterogeneous Federated Learning with Local Adaptation

Jul 30, 2021
Xuezhong Lin, Jingyu Pan, Jinming Xu, Yiran Chen, Cheng Zhuo

* 8 pages, 9 figures 

  Access Paper or Ask Questions