Diffusion models have gained attention in text processing, offering many potential advantages over traditional autoregressive models. This work explores the integration of diffusion models and Chain-of-Thought (CoT), a well-established technique to improve the reasoning ability in autoregressive language models. We propose Diffusion-of-Thought (DoT), allowing reasoning steps to diffuse over time through the diffusion process. In contrast to traditional autoregressive language models that make decisions in a left-to-right, token-by-token manner, DoT offers more flexibility in the trade-off between computation and reasoning performance. Our experimental results demonstrate the effectiveness of DoT in multi-digit multiplication and grade school math problems. Additionally, DoT showcases promising self-correction abilities and benefits from existing reasoning-enhancing techniques like self-consistency decoding. Our findings contribute to the understanding and development of reasoning capabilities in diffusion language models.