Prompt tuning is a parameter-efficient method, which learns soft prompts and conditions frozen language models to perform specific downstream tasks. Though effective, prompt tuning under few-shot settings on the one hand heavily relies on a good initialization of soft prompts. On the other hand, it can easily result in overfitting. Existing works leverage pre-training or supervised meta-learning to initialize soft prompts but they cannot data-efficiently generalize to unseen downstream tasks. To address the above problems, this paper proposes a novel Self-sUpervised meta-Prompt learning framework with meta-gradient Regularization for few-shot generalization (SUPMER). We first design a set of self-supervised anchor meta-training tasks with different task formats and further enrich the task distribution with curriculum-based task augmentation. Then a novel meta-gradient regularization method is integrated into meta-prompt learning. It meta-learns to transform the raw gradients during few-shot learning into a domain-generalizable direction, thus alleviating the problem of overfitting. Extensive experiments show that SUPMER achieves better performance for different few-shot downstream tasks, and also exhibits a stronger domain generalization ability.