Unsupervised domain adaptation (UDA) aims to adapt existing models of the source domain to a new target domain with only unlabeled data. The main challenge to UDA lies in how to reduce the domain gap between the source domain and the target domain. Existing approaches of cross-domain semantic segmentation usually employ a consistency regularization on the target prediction of student model and teacher model respectively under different perturbations. However, previous works do not consider the reliability of the predicted target samples, which could harm the learning process by generating unreasonable guidance for the student model. In this paper, we propose an uncertainty-aware consistency regularization method to tackle this issue for semantic segmentation. By exploiting the latent uncertainty information of the target samples, more meaningful and reliable knowledge from the teacher model would be transferred to the student model. The experimental evaluation has shown that the proposed method outperforms the state-of-the-art methods by around $3\% \sim 5\%$ improvement on two domain adaptation benchmarks, i.e. GTAV $\rightarrow $ Cityscapes and SYNTHIA $\rightarrow $ Cityscapes.