Abstract:The rise of compound AI serving -- integrating multiple operators in a pipeline that may span edge and cloud tiers -- enables end-user applications such as autonomous driving, generative AI-powered meeting companions, and immersive gaming. Achieving high service goodput -- i.e., meeting service level objectives (SLOs) for pipeline latency, accuracy, and costs -- requires effective planning of operator placement, configuration, and resource allocation across infrastructure tiers. However, the diverse SLO requirements, varying edge capabilities, and high query volumes create an enormous planning search space, rendering current solutions fundamentally limited for real-time serving and cost-efficient deployments. This paper presents Circinus, an SLO-aware query planner for large-scale compound AI workloads. Circinus novelly decomposes multi-query planning and multi-dimensional SLO objectives while preserving global decision quality. By exploiting plan similarities within and across queries, it significantly reduces search steps. It further improves per-step efficiency with a precision-aware plan profiler that incrementally profiles and strategically applies early stopping based on imprecise estimates of plan performance. At scale, Circinus selects query-plan combinations to maximize global SLO goodput. Evaluations in real-world settings show that Circinus improves service goodput by 3.2-5.0$\times$, accelerates query planning by 4.2-5.8$\times$, achieving query response in seconds, while reducing deployment costs by 3.2-4.0$\times$ over state of the arts even in their intended single-tier deployments.