Does Super-Resolution Preserve Defect Evidence? A Low-False-Call Benchmark for Semiconductor Inspection

Super-resolution can make inspection images appear sharper without preserving the evidence needed to detect a defect. We study this failure mode with a benchmark that separates reconstruction from detection and evaluates both at a predeclared low false-positive rate. Ten end-to-end repetitions combine independently generated line/space and contact-hole images with model training, calibration, clean controls, weak defects, and a held-out defect morphology. Every reconstruction is scored by the same local residual detector, while direct and jointly trained detectors form a separate comparison track. Reconstruction fidelity and inspection utility diverge: the two learned reconstruction models attain the highest structural similarity yet detect fewer defect pixels than bicubic interpolation in every paired repetition. A direct DeepLabV3 detector reaches $0.1984\pm0.0385$ recall at $0.000174\pm0.000084$ false-positive rate and satisfies the held-out feasibility criterion in all ten repetitions. An illustrative joint model, DPU-WaferSR, passes independent clean calibration but exceeds the held-out limit in all ten repetitions, demonstrating that calibration success does not guarantee transfer. Weak-defect recall remains near zero for every feasible method. Applying the unchanged policies to 4,591 public Carinthia-S masks further reveals large method-dependent shifts on real SEM texture. These results support a simple conclusion: super-resolution for inspection should be judged by preserved task evidence and operating-point transfer, not reconstruction quality alone.

AutoSiMP: Autonomous Topology Optimization from Natural Language via LLM-Driven Problem Configuration and Adaptive Solver Control

We present AutoSiMP, an autonomous pipeline that transforms a natural-language structural problem description into a validated, binary topology without manual configuration. The pipeline comprises five modules: (1) an LLM-based configurator that parses a plain-English prompt into a validated specification of geometry, supports, loads, passive regions, and mesh parameters; (2) a boundary-condition generator producing solver-ready DOF arrays, force vectors, and passive-element masks; (3) a three-field SIMP solver with Heaviside projection and pluggable continuation control; (4) an eight-check structural evaluator (connectivity, compliance, grayness, volume fraction, convergence, plus three informational quality metrics); and (5) a closed-loop retry mechanism. We evaluate on three axes. Configuration accuracy: across 10 diverse problems the configurator produces valid specifications on all cases with a median compliance penalty of $+0.3\%$ versus expert ground truth. Controller comparison: on 17 benchmarks with six controllers sharing an identical sharpening tail, the LLM controller achieves the lowest median compliance but $76.5\%$ pass rate, while the deterministic schedule achieves $100\%$ pass rate at only $+1.5\%$ higher compliance. End-to-end reliability: with the schedule controller, all LLM-configured problems pass every quality check on the first attempt $-$ no retries needed. Among the systems surveyed in this work (Table 1), AutoSiMP is the first to close the full loop from natural-language problem description to validated structural topology. The complete codebase, all specifications, and an interactive web demo will be released upon journal acceptance.

Large Language Models as Optimization Controllers: Adaptive Continuation for SIMP Topology Optimization

We present a framework in which a large language model (LLM) acts as an online adaptive controller for SIMP topology optimization, replacing conventional fixed-schedule continuation with real-time, state-conditioned parameter decisions. At every $k$-th iteration, the LLM receives a structured observation$-$current compliance, grayness index, stagnation counter, checkerboard measure, volume fraction, and budget consumption$-$and outputs numerical values for the penalization exponent $p$, projection sharpness $β$, filter radius $r_{\min}$, and move limit $δ$ via a Direct Numeric Control interface. A hard grayness gate prevents premature binarization, and a meta-optimization loop uses a second LLM pass to tune the agent's call frequency and gate threshold across runs. We benchmark the agent against four baselines$-$fixed (no-continuation), standard three-field continuation, an expert heuristic, and a schedule-only ablation$-$on three 2-D problems (cantilever, MBB beam, L-bracket) at $120\!\times\!60$ resolution and two 3-D problems (cantilever, MBB beam) at $40\!\times\!20\!\times\!10$ resolution, all run for 300 iterations. A standardized 40-iteration sharpening tail is applied from the best valid snapshot so that compliance differences reflect only the exploration phase. The LLM agent achieves the lowest final compliance on every benchmark: $-5.7\%$ to $-18.1\%$ relative to the fixed baseline, with all solutions fully binary. The schedule-only ablation underperforms the fixed baseline on two of three problems, confirming that the LLM's real-time intervention$-$not the schedule geometry$-$drives the gain. Code and reproduction scripts will be released upon publication.