Optimized Sampling of Angle-Resolved Scatterometry Data Using End-to-End Compressed Learning Model for Nanograss Deficiency Detection

Reliable inspection of nanosurfaces is essential to ensure the quality of nanostructure manufacturing. Angle-resolved scatterometry provides a non-invasive inspection method that can be used in-line but often suffers from long acquisition times due to dense angular sampling. This paper addresses the data acquisition challenge by proposing an end-to-end compressed learning framework for 5-level vacancy deficiency detection in zinc oxide nanograss using ARS images. The proposed framework integrates a learnable latitude-based sampling layer with a convolutional neural network, allowing sampling and classification to be jointly optimized during training. The sampling layer exploits the physical structure of ARS patterns and learns informative latitudinal regions, which reduces the sampling search space and improves convergence. Evaluation results show that the proposed approach achieves high and stable deficiency-level classification performance under different noise conditions. Using full ARS images, the model achieves 94.2% accuracy for five-level deficiency classification and 98.6% accuracy for separating deficient from non-deficient nanosurfaces. The proposed sampling model matches full-image performance while using up to 90% fewer angular sampling points. Even when sampling points are reduced by 99.7%, the classification accuracy decreases by less than 10 percentage points. To further improve training with limited data, we also studied a GAN-based augmentation approach and used GAN-generated data for model pretraining. Augmented data resulted in fast convergence within only a few fine-tuning epochs.

Compressed Learning for Nanosurface Deficiency Recognition Using Angle-resolved Scatterometry Data

Nanoscale manufacturing requires high-precision surface inspection to guarantee the quality of the produced nanostructures. For production environments, angle-resolved scatterometry offers a non- invasive and in-line compatible alternative to traditional surface inspection methods, such as scanning electron microscopy. However, angle-resolved scatterometry currently suffers from long data acquisition time. Our study addresses the issue of slow data acquisition by proposing a compressed learning framework for the accurate recognition of nanosurface deficiencies using angle-resolved scatterometry data. The framework uses the particle swarm optimization algorithm with a sampling scheme customized for scattering patterns. This combination allows the identification of optimal sampling points in scatterometry data that maximize the detection accuracy of five different levels of deficiency in ZnO nanosurfaces. The proposed method significantly reduces the amount of sampled data while maintaining a high accuracy in deficiency detection, even in noisy environments. Notably, by sampling only 1% of the data, the method achieves an accuracy of over 86%, which further improves to 94% when the sampling rate is increased to 6%. These results demonstrate a favorable balance between data reduction and classification performance. The obtained results also show that the compressed learning framework effectively identifies critical sampling areas.