Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions

Numerical models are used widely for parameter reconstructions in the field of optical nano metrology. To obtain geometrical parameters of a nano structured line grating, we fit a finite element numerical model to an experimental data set by using the Bayesian target vector optimization method. Gaussian process surrogate models are trained during the reconstruction. Afterwards, we employ a Markov chain Monte Carlo sampler on the surrogate models to determine the full model parameter distribution for the reconstructed model parameters. The choice of numerical discretization parameters, like the polynomial order of the finite element ansatz functions, impacts the numerical discretization error of the forward model. In this study we investigate the impact of numerical discretization parameters of the forward problem on the reconstructed parameters as well as on the model parameter distributions. We show that such a convergence study allows to determine numerical parameters which allow for efficient and accurate reconstruction results.

Using Gaussian process regression for efficient parameter reconstruction

Optical scatterometry is a method to measure the size and shape of periodic micro- or nanostructures on surfaces. For this purpose the geometry parameters of the structures are obtained by reproducing experimental measurement results through numerical simulations. We compare the performance of Bayesian optimization to different local minimization algorithms for this numerical optimization problem. Bayesian optimization uses Gaussian-process regression to find promising parameter values. We examine how pre-computed simulation results can be used to train the Gaussian process and to accelerate the optimization.

Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction

Numerical optimization is an important tool in the field of computational physics in general and in nano-optics in specific. It has attracted attention with the increase in complexity of structures that can be realized with nowadays nano-fabrication technologies for which a rational design is no longer feasible. Also, numerical resources are available to enable the computational photonic material design and to identify structures that meet predefined optical properties for specific applications. However, the optimization objective function is in general non-convex and its computation remains resource demanding such that the right choice for the optimization method is crucial to obtain excellent results. Here, we benchmark five global optimization methods for three typical nano-optical optimization problems from the field of shape optimization and parameter reconstruction: downhill simplex optimization, the limited-memory Broyden-Fletcher-Goldfarb-Shanno (L-BFGS) algorithm, particle swarm optimization, differential evolution, and Bayesian optimization. In these examples, Bayesian optimization, mainly known from machine learning applications, obtains significantly better results in a fraction of the run times of the other optimization methods.