An Evaluation of Continual Learning for Advanced Node Semiconductor Defect Inspection

Deep learning-based semiconductor defect inspection has gained traction in recent years, offering a powerful and versatile approach that provides high accuracy, adaptability, and efficiency in detecting and classifying nano-scale defects. However, semiconductor manufacturing processes are continually evolving, leading to the emergence of new types of defects over time. This presents a significant challenge for conventional supervised defect detectors, as they may suffer from catastrophic forgetting when trained on new defect datasets, potentially compromising performance on previously learned tasks. An alternative approach involves the constant storage of previously trained datasets alongside pre-trained model versions, which can be utilized for (re-)training from scratch or fine-tuning whenever encountering a new defect dataset. However, adhering to such a storage template is impractical in terms of size, particularly when considering High-Volume Manufacturing (HVM). Additionally, semiconductor defect datasets, especially those encompassing stochastic defects, are often limited and expensive to obtain, thus lacking sufficient representation of the entire universal set of defectivity. This work introduces a task-agnostic, meta-learning approach aimed at addressing this challenge, which enables the incremental addition of new defect classes and scales to create a more robust and generalized model for semiconductor defect inspection. We have benchmarked our approach using real resist-wafer SEM (Scanning Electron Microscopy) datasets for two process steps, ADI and AEI, demonstrating its superior performance compared to conventional supervised training methods.

Multi-agent Deep Reinforcement Learning for Zero Energy Communities

Advances in renewable energy generation and introduction of the government targets to improve energy efficiency gave rise to a concept of a Zero Energy Building (ZEB). A ZEB is a building whose net energy usage over a year is zero, i.e., its energy use is not larger than its overall renewables generation. A collection of ZEBs forms a Zero Energy Community (ZEC). This paper addresses the problem of energy sharing in such a community. This is different from previously addressed energy sharing between buildings as our focus is on the improvement of community energy status, while traditionally research focused on reducing losses due to transmission and storage, or achieving economic gains. We model this problem in a multi-agent environment and propose a Deep Reinforcement Learning (DRL) based solution. Each building is represented by an intelligent agent that learns over time the appropriate behaviour to share energy. We have evaluated the proposed solution in a multi-agent simulation built using osBrain. Results indicate that with time agents learn to collaborate and learn a policy comparable to the optimal policy, which in turn improves the ZEC's energy status. Buildings with no renewables preferred to request energy from their neighbours rather than from the supply grid.